Mass Flow
Low-cost Metal Seal Mass Flow Controller or Mass Flow Meter Compact metal seal Mass Flowmeter Standard Mass Flowmeter High-grade Mass Flow controller Standard Mass Flow meter Small Karman vortex 
                  flow meter for liquids
3440 SERIES 3300 SERIES 3660 SERIES 3200 SERIES 3660NV SERIES Small Karman vortex flow meter for liquids
Low-cost Metal Seal Mass Flow Controller or Mass Flow Meter Compact metal seal Mass Flowmeter Standard Mass Flowmeter Small Karman vortex 
                  flow meter for liquids
3810S SERIES 5400 SERIES 8100 SERIES REEDOUT_UNIT CR500

Standard Mass Flowmeter
MODEL 3660NV SERIES

MODEL 3660NV Series is the compact and low-cost mass-flowmeter that has been developed based on MODEL 3660 series. They has been developed as a successor to the MODEL 3750 series that has achieved many satisfactory results as a standard-adopted machine for various analysis devices and vacuum devices in applications of research and development in a number of universities and laboratories.

Features
Installation of the flow sensor of an improved constant-current temperature-difference detection type enables high-speed responses to be realized.
It is possible to install it anywhere because of its compact body.
Combination with DPM-100 enables alarm to be output (flow monitoring).
Combination with CR-500 enables flows to be accumulated (consumption monitoring).
Standard Mass Flow Controller
Standard specifications
Flow range
(on N2 conversion basis)
F.S. 50 to 500 SCCM, 1 to 20 SLM
Response 2 sec. or less (typical)
Accuracy within 1.5% F.S.
Pressure resistance 980 kPa
Leak rate 1 10 ?8 Pa?m 3 /second or less
Operating temperature 5 to 45C (accuracy guarantee: 15 to 35C)
Gas contact materials Body: SUS316L
Seal material: Viton TM (option: Noeprene TM)
Coupler Standard: 1/4SWL
Options: 1/8SWL, 1/4VCRTM, 1/4RC, and others
Electrical connection D-sub 9-pin male, KFC standard
Flow output signal 0 to 5 VDC
Power supply required +15 VDC ( 5%) 100 mA, ?15 VDC ( 5%) 100 mA