Flow range
(on N2 conversion basis) |
F.S. 50 to 500 SCCM, 1 to 20 SLM |
Response |
2 sec. or less (typical) |
Accuracy |
within ¡¾ 1.5% F.S. |
Pressure resistance |
980 kPa |
Leak rate |
1 ¡¿ 10 ?8 Pa?m 3 /second or less |
Operating temperature |
5 to 45¡ÆC (accuracy guarantee: 15 to 35¡ÆC) |
Gas contact materials |
Body: SUS316L
Seal material: Viton TM (option: Noeprene TM) |
Coupler |
Standard: 1/4SWL
Options: 1/8SWL, 1/4VCRTM, 1/4RC, and others |
Electrical connection |
D-sub 9-pin male, KFC standard |
Flow output signal |
0 to 5 VDC |
Power supply required |
+15 VDC (¡¾ 5%) 100 mA, ?15 VDC (¡¾ 5%) 100 mA |