Mass Flow
Low-cost Metal Seal Mass Flow Controller or Mass Flow Meter Compact metal seal Mass Flowmeter Standard Mass Flowmeter High-grade Mass Flow controller Standard Mass Flow meter Small Karman vortex 
                  flow meter for liquids
3440 SERIES 3300 SERIES 3660 SERIES 3200 SERIES 3660NV SERIES Small Karman vortex flow meter for liquids
Low-cost Metal Seal Mass Flow Controller or Mass Flow Meter Compact metal seal Mass Flowmeter Standard Mass Flowmeter Small Karman vortex 
                  flow meter for liquids
3810S SERIES 5400 SERIES 8100 SERIES REEDOUT_UNIT CR500

High-grade Mass Flow Controller
MODEL 3200 SERIES

The model 3200 series device is device is a new Mass Flow controller that has results in various fields such as semiconductors, LCDs, combustion, analysis, and biotechnology and designed as the successor of the 3910 series. It is a high-performance model that is suitable for a new Kofloc standard.

Features
Implementing high-accuracy and fast response by installing a flow sensor of temperature follow-up current difference detection method
Employing a normally-closed valve that operates in safe direction
Response to multi-gas by CF switching function
Employing a diaphragm seat valve to decrease a dead volume
Response to a minute flow of F.S. 1 SCCM (SR option)
Response to a low differential pressure for combustion gas control (LP option)
High-grade Mass Flow Controller
Standard specifications
Flow range
(on N2 conversion basis)
F.S. 10 to 500 SCCM, 1 to 5 SLM
F.S. 10 to 20 SLM
Valve method Normally-closed, solenoid, diaphragm seat valve
Control range 2 to 100%FS
Response 0 to 100% response, 1 second or less (within 2%, typical)
Accuracy Within 1.0%F.S.
Linearity Within 0.5%F.S.
Repeatability Within 0.2%F.S.
Operating differential pressure F.S. 5SLM 49 to 294 kPa
The *LP (low differential pressure) specifications differ with gases and flow rates.
5 < F.S 20 SLM 98 to 294 kPa
Pressure resistance 980 kPa
Leak rate 1 10 ?8 Pa?m 3 /second or less
Operating temperature 0 to 50C (accuracy guarantee: 0 to 50C)
Gas contact materials Body: SUS316L
Diaphragm: SUS316
Valve seat: PTFE
Seal materials: Byton TM (option: Neoprene)
Joint Standard: 1/4 SWL
Option: 1/8 SWL, 1/4 VCR TM, and 1/4 RC
Electrical connection* Dsub 9-pin, male KFC standard (conforming to SEMI standard)
Flow setting input signal 0 to 5 VDC
Flow output signal* 0 to 5 VDC
Power supply required* +15 VDC (5%) 100 mA and ?15 VDC (5%) 200 mA