Flow range
(on N2 conversion basis) |
F.S. 50 to 500 SCCM, 1 to 5 SLM
F.S.10 to 20SLM |
Valve type* |
Normally closed, solenoid, poppet valve |
Control range* |
2 to 100%F.S. |
Response |
2 sec. or less (within ¡¾ 2%, typical) for 0 to 100% |
Accuracy |
within ¡¾1.5% F.S. |
Repeatability* |
within ¡¾0.5% F.S. |
Operating differential pressure |
F.S. ¡Â 5SLM 49 to 294kPa
* Varies depending on LP (low differential pressure) specification gas and amount of flow.
5 < F.S. ¡Â 20SLM 98 to 294kPa |
Pressure resistance* |
980 kPa |
Leak rate* |
1 ¡¿ 10 ?8 Pa?m 3 /second or less |
Operating temperature |
5 to 45¡ÆC (accuracy guarantee: 15 to 35¡ÆC) |
Gas contact materials |
Body: SUS316L
Valve seat: Viton TM (option: Noeprene TM)
Seal material: Viton TM (option: Noeprene TM) |
Coupler* |
Standard: 1/4SWL
Options: 1/8SWL, 1/4VCR TM , 1/4RC, and others |
Electrical connection* |
D-sub 9-pin male, KFC standard (compliance with SEMI standard) |
Flow setting input signal |
0 to 5 VDC |
Flow output signal* |
0 to VDC |
Power supply required* |
+15 VDC (¡¾ 5%) 100 mA, ?15 VDC (¡¾ 5%) 200 mA |