Mass Flow
Low-cost Metal Seal Mass Flow Controller or Mass Flow Meter Compact metal seal Mass Flowmeter Standard Mass Flowmeter High-grade Mass Flow controller Standard Mass Flow meter Small Karman vortex 
                  flow meter for liquids
3440 SERIES 3300 SERIES 3660 SERIES 3200 SERIES 3660NV SERIES Small Karman vortex flow meter for liquids
Low-cost Metal Seal Mass Flow Controller or Mass Flow Meter Compact metal seal Mass Flowmeter Standard Mass Flowmeter Small Karman vortex 
                  flow meter for liquids
3810S SERIES 5400 SERIES 8100 SERIES REEDOUT_UNIT CR500

Compact Metal Seal Mass Flow Meter
MODEL 3660 SERIES

MODEL 3660 Series is the mass-flow controller mainly featuring compactness and low cost.
It has achieved many satisfactory results as a standard-adopted machine for various analysis devices and vacuum devices in applications of research and development in a number of universities and laboratories and provides a diversity of models and options.

Features
Installation of the flow current sensor of an improved constant-current temperature-difference detection type enables high-speed responses to be realized.
It adopts a normally closed valve moving only in a safety direction.
Use of a solenoid actuator ensures high reliability.
High-accuracy and high-speed responsiveness specification (3660A)
Light-weight specification because of adoption of aluminum body (3660LW)
Small differential pressure specification for controlling combustion gas (LP option)
Standard Mass Flow Controller

Standard specifications
Flow range
(on N2 conversion basis)
F.S. 50 to 500 SCCM, 1 to 5 SLM
F.S.10 to 20SLM
Valve type* Normally closed, solenoid, poppet valve
Control range* 2 to 100%F.S.
Response 2 sec. or less (within 2%, typical) for 0 to 100%
Accuracy within 1.5% F.S.
Repeatability* within 0.5% F.S.
Operating differential pressure F.S. 5SLM 49 to 294kPa
* Varies depending on LP (low differential pressure) specification gas and amount of flow.
5 < F.S. 20SLM 98 to 294kPa
Pressure resistance* 980 kPa
Leak rate* 1 10 ?8 Pa?m 3 /second or less
Operating temperature 5 to 45C (accuracy guarantee: 15 to 35C)
Gas contact materials Body: SUS316L
Valve seat: Viton TM (option: Noeprene TM)
Seal material: Viton TM (option: Noeprene TM)
Coupler* Standard: 1/4SWL
Options: 1/8SWL, 1/4VCR TM , 1/4RC, and others
Electrical connection* D-sub 9-pin male, KFC standard (compliance with SEMI standard)
Flow setting input signal 0 to 5 VDC
Flow output signal* 0 to VDC
Power supply required* +15 VDC ( 5%) 100 mA, ?15 VDC ( 5%) 200 mA