Flow range
(on N2 conversion basis) |
F.S. 10 to 500 SCCM, 1 to 5 SLM
F.S. 10 to 20 SLM |
Response |
0 to 100% response, 0.2 second or less (within ¡¾2%, typical) |
Accuracy |
Within ¡¾1% F.S. |
Linearity |
Within ¡¾0.5% F.S. |
Repeatability |
Within ¡¾0.2 F.S. |
Pressure resistance |
980 kPa |
Leak rate |
1 ¡¿ 10 ?11 Pa?m 3 /second or less |
Operating temperature |
0 to 50¡ÆC (accuracy guarantee: 0 to 50¡ÆC) |
Gas contact materials |
Body: SUS316L
Seal materials: AU |
Joint |
Standard: 1/4 VCRTM or equivalent
Option: 1/4 SWL |
Electrical connection* |
Dsub half-pitch 14-pin, female |
Flow output signal* |
0 to 5 VDC |
Power supply required* |
+15 VDC (¡¾5%), 90 mA, ?15 VDC (¡¾5%), 50 mA |