Mass Flow
Low-cost Metal Seal Mass Flow Controller or Mass Flow Meter Compact metal seal Mass Flowmeter Standard Mass Flowmeter High-grade Mass Flow controller Standard Mass Flow meter Small Karman vortex 
                  flow meter for liquids
3440 SERIES 3300 SERIES 3660 SERIES 3200 SERIES 3660NV SERIES Small Karman vortex flow meter for liquids
Low-cost Metal Seal Mass Flow Controller or Mass Flow Meter Compact metal seal Mass Flowmeter Standard Mass Flowmeter Small Karman vortex 
                  flow meter for liquids
3810S SERIES 5400 SERIES 8100 SERIES REEDOUT_UNIT CR500

Compact Metal Seal Mass Flow Meter
MODEL 3300 SERIES
 
The model 3300 series device is a compact Mass Flow meter whose size is reduced to 2/3 of the conventional model as a result of seeking a thorough downsizing. It is a high-grade model with a high-performance flow sensor installed and fast response and high-precision flow measurement ensured.

Features
Implementation of high accuracy and fast response with a flow sensor of temperature follow-up type current difference detection method
Metal seal model responding to corrosive gases
Compact body of 39 mm (W) x 90 mm (H) x 36 mm (D)
Responding to a minute flow of F.S. 1 SCCM (SR option)
Capable of responding to a collection unit of each company (option)
Compact Metal Seal Mass Flow Meter
Standard specifications
Flow range
(on N2 conversion basis)
F.S. 10 to 500 SCCM, 1 to 5 SLM
F.S. 10 to 20 SLM
Response 0 to 100% response, 0.2 second or less (within 2%, typical)
Accuracy Within 1% F.S.
Linearity Within 0.5% F.S.
Repeatability Within 0.2 F.S.
Pressure resistance 980 kPa
Leak rate 1 10 ?11 Pa?m 3 /second or less
Operating temperature 0 to 50C (accuracy guarantee: 0 to 50C)
Gas contact materials Body: SUS316L
Seal materials: AU
Joint Standard: 1/4 VCRTM or equivalent
Option: 1/4 SWL
Electrical connection* Dsub half-pitch 14-pin, female
Flow output signal* 0 to 5 VDC
Power supply required* +15 VDC (5%), 90 mA, ?15 VDC (5%), 50 mA